JPH0582540B2 - - Google Patents

Info

Publication number
JPH0582540B2
JPH0582540B2 JP14886484A JP14886484A JPH0582540B2 JP H0582540 B2 JPH0582540 B2 JP H0582540B2 JP 14886484 A JP14886484 A JP 14886484A JP 14886484 A JP14886484 A JP 14886484A JP H0582540 B2 JPH0582540 B2 JP H0582540B2
Authority
JP
Japan
Prior art keywords
pressure
base
spiral coil
fixed electrode
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14886484A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6126834A (ja
Inventor
Isao Iwasaki
Toshuki Matsunaka
Hide Kobayashi
Akira Arakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP14886484A priority Critical patent/JPS6126834A/ja
Publication of JPS6126834A publication Critical patent/JPS6126834A/ja
Publication of JPH0582540B2 publication Critical patent/JPH0582540B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP14886484A 1984-07-17 1984-07-17 静電容量型圧力センサ Granted JPS6126834A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14886484A JPS6126834A (ja) 1984-07-17 1984-07-17 静電容量型圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14886484A JPS6126834A (ja) 1984-07-17 1984-07-17 静電容量型圧力センサ

Publications (2)

Publication Number Publication Date
JPS6126834A JPS6126834A (ja) 1986-02-06
JPH0582540B2 true JPH0582540B2 (en]) 1993-11-19

Family

ID=15462440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14886484A Granted JPS6126834A (ja) 1984-07-17 1984-07-17 静電容量型圧力センサ

Country Status (1)

Country Link
JP (1) JPS6126834A (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8803112D0 (en) * 1988-02-11 1988-03-09 British Petroleum Co Plc Zeolite catalysts suitable for hydrocarbon conversion
US5421213A (en) * 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
JP2007235754A (ja) * 2006-03-02 2007-09-13 Alps Electric Co Ltd 広帯域発振器
DE102011077868A1 (de) * 2011-06-21 2012-12-27 Robert Bosch Gmbh Drucksensoranordnung zur Erfassung eines Drucks eines fluiden Mediums in einem Messraum

Also Published As

Publication number Publication date
JPS6126834A (ja) 1986-02-06

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